Spectroscopic Ellipsometry Workshop with Semilab
Date: Wed., September 18 (10:30 AM - 6:30 PM) and Thurs., September 19 (11:00 AM - 5:00 PM)
Location: 12-0168 (MIT.nano basement)
Register for this talk
This workshop aims to bring together beginners and experts to exchange knowledge, discuss recent developments, and collaborate on innovative new applications for ellipsometry.
Semilab experts will offer tutorials on the basic and advanced applications to help attendees gain confidence in using ellipsometry for sample characterization. The workshop will also include interactive sessions and networking opportunities. The interactive nature promises to be a valuable platform for intellectual growth and professional development, fostering a sense of community among participants.
Topics to be covered include:
- Introduction to spectroscopic ellipsometry
- Basic and advanced optical modeling
- Extended wavelength applications in the DUV, Near-IR, and Mid-IR.
- Model-based dimensional analysis for non-planar structures
- In-situ possibilities for spectroscopic ellipsometry
AGENDA
September 18, 2024
10:30 AM - Registration and welcome coffee
11:00 AM - Opening remarks and presentation of participants, John Byrnes, Semilab
11:05 AM - Introduction to MIT.nano
11:15 AM - Introduction to Semilab Semiconductor Physics Laboratory, John Byrnes, Semilab
11:25 AM - Introduction to Spectroscopic Ellipsometry (SE) – Theory and principles of ellipsometry, László Makai, Semilab
12:00 PM - Overview of Semilab ellipsometers and extended features, András Marton, Semilab
1:00 PM - Lunch & networking
2:00 PM - Demonstration of spectroscopic ellipsometric measurement and characterization, László Makai, Semilab
2:30 PM - Spectroscopic Ellipsometry Analyzer (SEA) software introduction and overview, Imre Balogh, Semilab
3:30 PM - Laboratory visits – Parallel sessions (Spectroscopic Ellipsometer), László Makai, Imre Balogh, András Marton
6:30 PM - Close
September 19, 2024
11:00 AM - Introduction to model-based dimension analysis, Imre Balogh, Semilab
11:50 AM - Coffee break
12:00 PM - Extended wavelength range ellipsometry: DUV, NIR, MID-IR, László Makai, Semilab
12:20 PM - Laboratory visits – Parallel sessions (Spectroscopic Ellipsometer), László Makai, Imre Balogh, András Marton
1:30 PM - Lunch & networking
2:30 PM - Closing remarks, John Byrnes, Semilab
2:40-5:00 PM - Laboratory visits – Visitors sample measurements on demand, László Makai, Imre Balogh, András Marton