Facility Updates

Both the VTR and the LAM590-TRL encountered hardware problems from the Building 39 power shutdown in November. As a result, we are unable to bring them back up, and the VTR and LAM590-TRL will be decommissioned.

With the AME5000 back online and the three SAMCO etchers taking on the role for fluorine and chlorine chemistry etching, and no tool uses since September on both, the ICL LAM490B and LAM590-ICL will be shut down on March 1st and then decommissioned.

Read more in this update.

The 6.152J/3.155J undergraduate lab class will be back at MIT.nano as part of the Spring 2022 course offerings.

Read more in this update.

The Elionix HS-50 arrived at MIT.nano in late December. Read more about installation and when this tool will be available to facility users in this update.

MIT.nano's mechanical / maintenance week will take place January 3 - 7, 2022. MIT facilities will be carrying out a number of maintenance tasks. The cleanroom will remain open, but some tool-specific disruptions will occur for 2-3 days.

Read more in this update.

During the upcoming holidays, MIT.nano will be closed to regular users during the two extended weekends (December 24–26, and December 31–January 2). We will operate on "after hours" schedule, and 24-hour users can continue to use the fab, like on all holidays.

For the four days between the long weekends, several staff have volunteered to help replenish supplies in Buildings 12 & 39, and to maintain lab safety including chemicals/waste. That means regular users can use the fabs 9 AM – 5 PM Monday (12/27) – Thursday (12/30). 

Read more, and see a detailed schedule, in this update.

MIT.nano has received the Al pucks for the ESI Asher for users to run descum and ashing on pieces. Read more in this update.

Fab.nano will be closed for Thanksgiving as well as the extended MIT Winter Break. Read dates and policies for holiday operations in this update.

The pricing for large sample Fab.nano storage cubbies is increasing as of January 2022.

Read more in this update.

The Sigma300 Scanning Electron Microscope in Fab.nano will be coming online the first week of November.

Read more in this update.

MIT.nano staff have placed a cold-plate (CORAL Coldplate-Solvent) for PMMA developing in Liftoff-L10.

Read more in this update.