Facility Updates

MIT.nano has placed an order for an Elionix HS-50 ebeam writer, as a replacement for the ICL stepper. The HS-50, expected to arrive in October, will be located in the Fab-12 cleanroom on the first floor.

Read more in this update.

The Asher-Barrel-Thierry will go live the first week of March in Building 12. MIT.nano staff have prepared a training video (watch in this update), and posted standard operating procedures (SOP) by the tool. MIT.nano users can find the tool in CORAL: “Asher-Barrel-Thierry” under B-12 / Litho.

Read more.

Beginning in March, MIT.nano will require labeling for all personal chemicals. Researchers should work with MIT.nano Environment, Health, and Safety (EHS) Manager Whitney Hess to identify your approved chemicals if they are missing a label.

Read more in this update.

Fab.nano will be closed on Monday, February 15, 2021 in observance of Presidents' Day. As usual during Institute holidays, the fabs in Bldg. 39 and in Bldg. 12 will not be staffed; therefore, they will be only open to qualified 24-hr users.

MIT.nano has three standard photoresists in Building 12. Learn more, including where to find the recipes, in this update.

Fab.nano will operate under holiday guidelines on Monday, January 18, in observance of Martin Luther King Jr. Day, a national and Institute holiday.

The new mixed-gas SAMCO etcher was placed and leveled at MIT.nano on Friday, January 8, 2021. Installation is scheduled for completion by the end of February.

MIT will be closed on Thursday, 12/24 and Friday, 12/25 for the Christmas Day holiday so Fab.nano will be closed. 

This year MIT has extended the holiday period to include the following week of 12/28 through New Years Day, Friday 1/1/21. As usual during Institute holidays, the fabs in Building 39 and Building 12 will not be staffed, so they will be only open to qualified 24hr users who must follow the buddy policies in each fab.

MIT.nano is preparing for phase II of the tool move from Building 39 to Building 12. Litho/metrology tools are moving first, in February and March. Once process cooling water is installed by MIT, the vacuum tools will be able to move, tentatively in May/June/July.